By Jousten, Karl (ed.)
ISBN-10: 3527413383
ISBN-13: 9783527413386
ISBN-10: 3527688234
ISBN-13: 9783527688234
ISBN-10: 3527688242
ISBN-13: 9783527688241
ISBN-10: 3527688250
ISBN-13: 9783527688258
ISBN-10: 3527688269
ISBN-13: 9783527688265
This finished, common paintings has been up-to-date to stay an immense source for all these desiring specified wisdom of the speculation and functions of vacuum expertise.
The textual content covers the prevailing wisdom on all elements of vacuum technological know-how and know-how, starting from basics to parts and working structures. It positive aspects many numerical examples and illustrations to aid visualize the theoretical matters, whereas the chapters are conscientiously cross-linked and coherent symbols and notations are used in the course of the ebook. the complete is rounded off via a straightforward appendix of conversion tables, mathematical instruments, fabric similar facts, overviews of tactics and methods, equipment-related facts, nationwide and foreign criteria, directions, and lots more and plenty more.
for this reason, engineers, technicians, and scientists might be in a position to improve and paintings effectively with the apparatus and atmosphere present in a vacuum.
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Extra resources for Handbook of vacuum technology
Sample text
1987) Vacuum gauging in the electronics industry. J. Vac. Sci. Technol. A, 5, 3230–3231. F. G. (1992) Impact of vacuum equipment contamination on semiconductor yield. J. Vac. Sci. Technol. A, 10, 1863–1868. K. (1994) Controlling your vacuum process: effective use of a QMA. Semicond. , 79–84. E. (1993) Process control in the semiconductor manufacturing environment using a high pressure quadrupole mass spectrometer. Vacuum, 44, 665–668. Gennermann, D. (2000) Abgasmanagement von Vakuumprozessen moderner Halbleiter-Produktionsanlagen.
As the experiments showed, the volume V decreases when the pressure p rises. 16) In 1704, Amontons discovered that a change in gas temperature leads to a change in pressure. Toward the end of the eighteenth century, experiments con ducted by Charles and Gay-Lussac revealed that, for a fixed amount of gas, the 35 36 3 Gas Laws and Kinetic Theory of Gases product pV increases linearly with a rise in temperature. Conversely, the product pV decreases linearly when the temperature drops and, for sufficiently low tem peratures, approaches zero.
Ann. , 6, 357–392. Langmuir, I. (1916) Gen. Electr. , 19, 1060. Pirani, M. (1906) Selbstanzeigendes Vakuum-Meßinstrument. Verh. Dtsch. Phys. , 8, 686–694. T. and Alpert, D. (1950) Extension of low pressure range of the ionization gauge. Rev. Sci. , 2, 571–572. Genz, H. (2004) Nichts als das Nichts — Die Physik des Vakuums, Wiley-VCH Verlag GmbH, p. 266. Bojowald, M. (2011) Alles aus dem Nichts. Phys. , 10 (3), 37. Further Reading Auwaerter, M. (1983) Das Vakuum und Wolfgang Gaede. , 32 (8), 234–246.
Handbook of vacuum technology by Jousten, Karl (ed.)
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